Bellow seal multilayer piezoelectric actuators

The Bellow seal multilayer piezoelectric actuators of co-fired multilayer piezoelectric actuators and a bellows-encapsulated diaphragm. The product features large displacement, fast response, high thrust, very low heat generation, excellent sealing and insulation properties, and a long cycle life. It has a wide range of applications and can be used for nano-drive, positioning, and vibration damping in integrated circuit manufacturing, precision machining, cellular medicine, and high-precision imaging.

 

Features:

l   High reliability;

l   Precise nano-positioning;

l   Minimized mechanical losses;

l   Operating temperature: -30°C to 150°C;

l   Maximum thrust of up to 3600N.

Bellow seal multilayer piezoelectric actuators Rule series

Specification Length
±0.1(mm)
Electrical Capacitance
±20%(uF)
voltage
(V)
Displacement
±10%(μm)
Stiffness
(N/μm)
Blocking force
(N)
WHM60-11-F 64 5.8 120 60 14 900
WHM50-11-F 48 4 120 50 18 900
All other specifications can be customized

Service hotline

18685196500

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