The co-fired multilayer piezoelectric actuators has a maximum size of 7×7×36 mm³ and a minimum size of 2×2×2 mm³. It is fabricated through the co-firing of ceramic layers and Ag-Pd electrodes into an integrated structure. The product offers large displacement, fast response, high thrust, very low heat generation, and a cyclic lifespan of up to 10^9 cycles. It is suitable for applications such as nano-drive, positioning, and vibration damping in precision processing equipment，semiconductor manufacturing and imaging systems.
| Specification | Dimensions±0.1（mm） | Electrical Capacitance±20％（uF） | voltage（V） | Resonant frequency±20%（kHz） | Displacement±10%（μm） | Stiffness（N/μm） | Blocking force（N） |
|---|---|---|---|---|---|---|---|
| WHG2-2-2-120 | 2×2×2 | 0.2 | 120 | 150 | 1.5 | 100 | 150 |
| WHG7-7-18-120 | 7×7×18 | 3.8 | 120 | 70 | 18 | 100 | 1780 |
| WHG3-3-9-120 | 3×3×9 | 0.65 | 120 | 135 | 8 | 40 | 300 |
| WHG5-5-36-120 | 5×5×36 | 3.7 | 120 | 38 | 38 | 20 | 800 |
| WHG3-3-18-120 | 3×3×18 | 1.3 | 120 | 70 | 16 | 18 | 300 |
| WHG5-5-18-120 | 5×5×18 | 1.6 | 120 | 70 | 18 | 45 | 800 |
| WHG5-5-9-120 | 5×5×9 | 0.8 | 120 | 135 | 8 | 100 | 800 |
| WHG7-7-36-120 | 7×7×36 | 8 | 120 | 38 | 38 | 45 | 1780 |
| WHG3-3-13.5-120 | 3×3×13.5 | 0.9 | 120 | 90 | 12 | 25 | 300 |
| WHG5-5-13.5-120 | 5×5×13.5 | 1.2 | 120 | 90 | 12 | 70 | 800 |
| All other specifications can be customized | |||||||
